journal£ºJournal of Micromechanics and Microengineering
Authors£ºDik Son Cheah; Yousif Saad Alshebly; Mohamed Sultan Mohamed Ali; Marwan Nafea
Published date£º2022-6-1
DOI£º10.1088/1361-6439/ac68ca
Article link£ºhttp://dx.doi.org/10.1088/1361-6439/ac68ca
Article Source£ºIOP Publishing¡£
Remark£ºI need the published version not the accepted version. |