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[SPIE] Optimal etch recipe prediction for 3D NAND structures

sjm356 Post time 2022-5-13 15:17:41 | Show all posts |Read mode
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journal£ºAdvanced Etch Technology for Nanopatterning IX

Authors£ºLeandro Medina; Bryan Sundahl; Meghali Chopra; Roger T. Bonnecaze

Published date£º2020-3-23

DOI£º10.1117/12.2552121

Article link£ºhttp://dx.doi.org/10.1117/12.2552121

Article Source£ºSPIE¡£


Remark£º

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2022-5-13
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