Fundamental aspects of substrate biasing: ion velocity distributions and nonlinear effects

Post time 2022-8-20 17:27:41

journal：Journal of Physics D: Applied Physics

Authors：Tim Baloniak; Rüdiger Reuter; Achim von Keudell

Published date：2010-8-25

DOI：10.1088/0022-3727/43/33/335201

Article link：http://dx.doi.org/10.1088/0022-3727/43/33/335201

Article Source：IOP Publishing。

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[IOP] Fundamental aspects of substrate biasing: ion velocity distributions and nonlinear effects

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